Clean type Pressure Transmitter for Semiconducting Industry VSHS/VSHT series | VALCOM CO.,LTD. [Specialized manufacturer of Digital Pressure Meters and Load Cells]

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Clean type Pressure Transmitter for Semiconducting Industry
VSHS/VSHT series
0.3MPa–20MPa

Electropolishing finish and precision cleaning.
Supports VCR/UJR fittings of 1/4, 3/8 and 1/2 internal/external threads.
Corrosion-resistant construction with SUS316L (VIM+VAR) wetted surfaces.

Measured medium	Gases, liquids or other media that will not corrode SUS316L.
Pressure Type	Positive and compound pressures can be measured.
Measured Range	Can be specified within the range of 0.3 to 20 MPa of rated capacity. In addition, calibration of compound pressure within the range 0.1 to 1MPa is possible.
Output type	Specify among 4 to 20mA (2 wire system), 4 to 20 mA (2-wire, 4-wire), 1 to 5 V, 0 to 5 V, and 0 to 10 V.

Specifications

Accuracy	±0.4%R.C. (0.3MPa:±0.5%R.C.)
Compensated Temperature Range (Temperature of medium to be measured)	0–60°C (No condensation or freezing)
Operating Temperature Range (Temperature of medium to be measured)	0–80°C (No condensation or freezing)
Temperature Effect	±0.5%R.C./10°C
Safe Overload Rating	200%R.C.(20MPa:150%R.C.)
Leakage	1×10^-10Pa·m³/sec. or less
Pressure Port Material	SUS316L (VIM+VAR) VIM:Vacuum Induction Melting VAR:Vacuum Arc Remelting
Sealing	Special electron beam welding
Finish(Sensor Part)	Electropolishing (Ra0.25µm or less) and Precision cleaning
Screw type	VCRsupported [1/4, 3/8 and 1/2] male and female screw UJR [1/4, 3/8 and 1/2] male and female screw
Cable	PVC coated 3-core (current type is 2-core) shielded 3m(UL-compliant) Pigtail or Connector connection
Weight	Approx. 280g (Cable 3m included)
Accessories	Operating manual 1 copy (Specify English or Japanese.) Test report 1 copy

Model Selection

Example

Selection	Check	Model	Specifications
1.Model		VSHS	Single feed port
1.Model		VSHT	Double feed port
2.Screw Size		00	Integral male screw equivalent to 1/4VCR
		01	1/4VCR supported male screw
		02	3/8VCR supported male screw
		03	1/2VCR supported male screw
		11	1/4VCR supported female screw
		12	3/8VCR supported female screw
		13	1/2VCR supported female screw
		21	1/4UJR male screw
		22	3/8UJR male screw
		23	1/2UJR male screw
		31	1/4UJR female screw
		32	3/8UJR female screw
		33	1/2UJR female screw
3.Analog output	-	-	Output type	Response frequency	Safe load resistance	Consumption current
		A2	1–5V (3-wire system)	50Hz	100kΩ or more	Approx. 10mA
		A4	0–5V (3-wire system)
		A5	0–10V (3-wire system)
		A6	4 to 20mA (2 wire system)		500Ω or less	Approx. 20mA
4.Calibration	-	-	Rated capacity	Example of calibration range
		See right table. Enter the range in the as it is.	0.3MPa	0.3MPa (0–0.3)MPa		Specify at least 60% of the rated capacity. *Rated capacity 3.5MPa and 10MPa are only 100%
			1MPa	1MPa (0–1)MPa
			3.5MPa	3.5MPa (0–3.5)MPa
			10MPa	10MPa (0–10)MPa
			20MPa	20MPa (0–20)MPa
5.Cable Connection		S	Pigtail
5.Cable Connection		N	Connector connection
6.Length (Cable)		01	1m
		02	2m
		03	3m Standard
		□□	4–99m *Specify required length in meters. m
7.Rated Capacity (R.C.)		003	0.3MPa
		010	1MPa
		035	3.5MPa
		100	10MPa
		200	20MPa
8.Power		4	DC24V (Current output only)
8.Power		6	DC15–24V (Voltage output only)
9.Data		N	Test report (3-point measurement)/(Standard)
		T	Traceability documents (Breakdown of traceability documents 1: Traceability certificate 2: Traceability system diagram 3: Test report (3-point measurement))
		K	Strength calculation sheet
		M	Mill seet
		L	Strength calculation sheet + Mill seet
		W	Traceability documents + Strength calculation sheet
		Y	Traceability documents + Mill seet
		S	Traceability documents + Strength calculation sheet + Mill seet